-
公开(公告)号:US20200225185A1
公开(公告)日:2020-07-16
申请号:US16742987
申请日:2020-01-15
Inventor: Hee-Tae JUNG , Hohyung KANG , Heeeun JOO , Soo Yeon CHO , Woo-Bin JUNG
IPC: G01N27/407 , G01N27/416 , H01L21/3065 , G01N27/12
Abstract: The present disclosure relates to a sensor including a nanostructure and a method for manufacturing the same.