公开(公告)号：US10217190B2

公开(公告)日：2019-02-26

申请号：US15391520

申请日：2016-12-27

Applicant: KLA-Tencor Corporation

Inventor： Helen Liu ,  Rohit Patnaik ,  Stephen Osborne

IPC: G06K9/32 ,  G06T3/40 ,  G06T5/20 ,  G06T5/50

Abstract: A method for reconstructing one or more high-resolution point spread functions (PSF) from one or more low-resolution images includes acquiring one or more low-resolution images of a wafer, aggregating the one or more low-resolution image patches, and estimating one or more sub-pixel shifts in the one or more low-resolution images and simultaneously reconstructing one or more high-resolution PSF from the aggregated one or more low-resolution image patches.

公开(公告)号：US20180182067A1

公开(公告)日：2018-06-28

申请号：US15391520

申请日：2016-12-27

Applicant: KLA-Tencor Corporation

Inventor： Helen Liu ,  Rohit Patnaik ,  Stephen Osborne

IPC: G06T3/40 ,  G06T5/20 ,  G06T5/50

CPC classification number: G06T3/4053 ,  G06T3/4069 ,  G06T5/002 ,  G06T5/20 ,  G06T5/50

Abstract: A method for reconstructing one or more high-resolution point spread functions (PSF) from one or more low-resolution images includes acquiring one or more low-resolution images of a wafer, aggregating the one or more low-resolution image patches, and estimating one or more sub-pixel shifts in the one or more low-resolution images and simultaneously reconstructing one or more high-resolution PSF from the aggregated one or more low-resolution image patches.