公开(公告)号：US10354373B2

公开(公告)日：2019-07-16

申请号：US15908553

申请日：2018-02-28

Applicant: KLA-Tencor Corporation

Inventor： Avner Safrani ,  Ron Rudoi

IPC: G06T7/00 ,  G06T7/73 ,  G03F1/70 ,  H01L21/68 ,  G03F1/42 ,  G03F7/20

Abstract: A notch detection system receives images of a sample from the imaging detector, in which the sample includes a notched surface and an un-notched surface bounded by a sidewall and further includes at least one notch known notch specifications. The images are generated such that illumination unobstructed by the sample is received by the detector and the sample prevents incident illumination from reaching the detector. The system further determines whether each image includes a notch, identifies the notched surface, and directs a sample positioner to position the sample with the notched surface in a selected direction when a notch is identified in at least one image of the one or more images.

公开(公告)号：US20180315179A1

公开(公告)日：2018-11-01

申请号：US15908553

申请日：2018-02-28

Applicant: KLA-Tencor Corporation

Inventor： Avner Safrani ,  Ron Rudoi

IPC: G06T7/00 ,  G06T7/73 ,  H01L21/68 ,  G03F1/70

CPC classification number: G06T7/0004 ,  G03F1/42 ,  G03F1/70 ,  G03F7/70741 ,  G06T7/0006 ,  G06T7/73 ,  G06T2207/30148 ,  H01L21/681 ,  H01L21/682

Abstract: A notch detection system receives images of a sample from the imaging detector, in which the sample includes a notched surface and an un-notched surface bounded by a sidewall and further includes at least one notch known notch specifications. The images are generated such that illumination unobstructed by the sample is received by the detector and the sample prevents incident illumination from reaching the detector. The system further determines whether each image includes a notch, identifies the notched surface, and directs a sample positioner to position the sample with the notched surface in a selected direction when a notch is identified in at least one image of the one or more images.