公开(公告)号：US10372114B2

公开(公告)日：2019-08-06

申请号：US15299616

申请日：2016-10-21

Applicant: KLA-Tencor Corporation

Inventor： Karen Biagini ,  Bryant Stanford Mantiply ,  Ravichander Jayantha Rao ,  Gary Taan

IPC: G05B19/418 ,  H01L21/67 ,  H01L21/66

Abstract: A process control technique uses production data from multiple manufacturing tools and multiple inspection or metrology tools. Total measurement uncertainty (TMU) can be calculated on the production data, which can include measurements of one or more devices manufactured using the manufacturing tools. Manufacturing steps can be ranked or otherwise compared by TMU. All production modes and recipes can be continually monitored using production data.

公开(公告)号：US20180113441A1

公开(公告)日：2018-04-26

申请号：US15299616

申请日：2016-10-21

Applicant: KLA-Tencor Corporation

Inventor： Karen Biagini ,  Bryant Stanford Mantiply ,  Ravichander Jayantha Rao ,  Gary Taan

IPC: G05B19/418 ,  H01L21/67 ,  H01L21/66

CPC classification number: G05B19/4184 ,  G05B2219/37525 ,  H01L22/20 ,  Y02P90/14 ,  Y02P90/20

Abstract: A process control technique uses production data from multiple manufacturing tools and multiple inspection or metrology tools. Total measurement uncertainty (TMU) can be calculated on the production data, which can include measurements of one or more devices manufactured using the manufacturing tools. Manufacturing steps can be ranked or otherwise compared by TMU. All production modes and recipes can be continually monitored using production data.