公开(公告)号：US20190056637A1

公开(公告)日：2019-02-21

申请号：US16036724

申请日：2018-07-16

Applicant: KLA-Tencor Corporation

Inventor： Mandar Paranjape ,  Vladimir Dribinski ,  Yung-Ho Alex Chuang

IPC: G02F1/35 ,  G02F1/355 ,  H01S3/109 ,  H01S3/094 ,  C30B33/00 ,  G01N21/84

Abstract: In-situ passivation of a nonlinear optical (NLO) crystal during operation of a characterization tool includes converting a laser beam of a selected wavelength to a converted laser beam of a harmonic wavelength via a nonlinear optical (NLO) crystal and passivating the NLO crystal during conversion to the converted laser beam of the harmonic wavelength.