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公开(公告)号：US20170278694A1
公开(公告)日：2017-09-28
申请号：US15285333
申请日：2016-10-04
Applicant: KLA-Tencor Corporation
Inventor： Yung-Ho Alex Chuang , Xiaoxu Lu , Justin Liou , John Fielden
CPC classification number: H01J61/025 , H01J61/125 , H01J61/16 , H01J61/20 , H01J61/54 , H01J65/04 , H05H1/24
Abstract: A high brightness laser-sustained broadband light source includes a gas containment structure and a pump laser configured to generate a pump beam including illumination of a wavelength at least proximate to a weak absorption line of a neutral gas contained in the gas containment structure. The broadband light source includes one or more anamorphic illumination optics configured to focus the pump beam into an approximately elliptical beam waist positioned in or proximate to the center of the gas containment structure. The broadband light source includes one or more first collection optics configured to collect broadband radiation emitted by the plasma in a direction substantially aligned with a longer axis of the elliptical beam waist.
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公开(公告)号：US10032619B2
公开(公告)日：2018-07-24
申请号：US15842540
申请日：2017-12-14
Applicant: KLA-Tencor Corporation
Inventor： Yung-Ho Alex Chuang , Xiaoxu Lu , Justin Liou , John Fielden
CPC classification number: H01J61/025 , H01J61/125 , H01J61/16 , H01J61/20 , H01J61/54 , H01J65/04 , H05H1/24
Abstract: A high brightness laser-sustained broadband light source includes a gas containment structure and a pump laser configured to generate a pump beam including illumination of a wavelength at least proximate to a weak absorption line of a neutral gas contained in the gas containment structure. The broadband light source includes one or more anamorphic illumination optics configured to focus the pump beam into an approximately elliptical beam waist positioned in or proximate to the center of the gas containment structure. The broadband light source includes one or more first collection optics configured to collect broadband radiation emitted by the plasma in a direction substantially aligned with a longer axis of the elliptical beam waist.
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公开(公告)号：US20180114687A1
公开(公告)日：2018-04-26
申请号：US15842540
申请日：2017-12-14
Applicant: KLA-Tencor Corporation
Inventor： Yung-Ho Alex Chuang , Xiaoxu Lu , Justin Liou , John Fielden
CPC classification number: H01J61/025 , H01J61/125 , H01J61/16 , H01J61/20 , H01J61/54 , H01J65/04 , H05H1/24
Abstract: A high brightness laser-sustained broadband light source includes a gas containment structure and a pump laser configured to generate a pump beam including illumination of a wavelength at least proximate to a weak absorption line of a neutral gas contained in the gas containment structure. The broadband light source includes one or more anamorphic illumination optics configured to focus the pump beam into an approximately elliptical beam waist positioned in or proximate to the center of the gas containment structure. The broadband light source includes one or more first collection optics configured to collect broadband radiation emitted by the plasma in a direction substantially aligned with a longer axis of the elliptical beam waist.
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公开(公告)号：US09865447B2
公开(公告)日：2018-01-09
申请号：US15285333
申请日：2016-10-04
Applicant: KLA-Tencor Corporation
Inventor： Yung-Ho Alex Chuang , Xiaoxu Lu , Justin Liou , John Fielden
CPC classification number: H01J61/025 , H01J61/125 , H01J61/16 , H01J61/20 , H01J61/54 , H01J65/04 , H05H1/24
Abstract: The broadband light source includes a gas containment structure and a pump laser for generating a pump beam including illumination of a wavelength near that of a weak absorption line of a neutral gas contained in the gas containment structure. The broadband light source also includes anamorphic optics for focusing the pump beam into an elliptical beam waist positioned in or near the center of the gas containment structure. The broadband light source also includes collection optics for collecting broadband radiation emitted by the plasma in a direction aligned with a longer axis of the elliptical beam waist.
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