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公开(公告)号：US11056366B2
公开(公告)日：2021-07-06
申请号：US16280145
申请日：2019-02-20
Applicant: KLA-Tencor Corporation
Inventor： Giampietro Bieli , Robert Tas , Kevin O'Brien , Shankar Krishnan , Joshua Butler
Abstract: A metrology system may include one or more casings that fit within an interior cavity of a sample transport device, an illumination source within one of the one or more casings, one or more illumination optics within one of the one or more casings for directing illumination from the illumination source to a sample located in the interior cavity of the sample transport device, one or more collection optics within one of the one or more casings for light from the sample in response to the illumination from the illumination source, and one or more detectors within one of the one or more casings for generating metrology data based on at least a portion of the light collected by the one or more collection optics.
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公开(公告)号：US20190295874A1
公开(公告)日：2019-09-26
申请号：US16280145
申请日：2019-02-20
Applicant: KLA-Tencor Corporation
Inventor： Giampietro Bieli , Robert Tas , Kevin O'Brien , Shankar Krishnan , Joshua Butler
Abstract: A metrology system may include one or more casings that fit within an interior cavity of a sample transport device, an illumination source within one of the one or more casings, one or more illumination optics within one of the one or more casings for directing illumination from the illumination source to a sample located in the interior cavity of the sample transport device, one or more collection optics within one of the one or more casings for light from the sample in response to the illumination from the illumination source, and one or more detectors within one of the one or more casings for generating metrology data based on at least a portion of the light collected by the one or more collection optics.
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