公开(公告)号：US11550309B2

公开(公告)日：2023-01-10

申请号：US16242844

申请日：2019-01-08

Applicant: KLA-Tencor Corporation

Inventor： Erfan Soltanmohammadi ,  Ashwin Ramakrishnan ,  Mohit Jani

IPC: G05B19/418

Abstract: An inspection system may receive inspection datasets from a defect inspection system associated with inspection of one or more samples, where an inspection dataset of the plurality of inspection datasets associated with a defect includes values of two or more signal attributes and values of one or more context attributes. An inspection system may further label each of the inspection datasets with a class label based on respective positions of each of the inspection datasets in a signal space defined by the two or more signal attributes, where each class label corresponds to a region of the signal space. An inspection system may further segment the inspection datasets into two or more defect groups by training a classifier with the values of the context attributes and corresponding class labels for the inspection datasets, where the two or more defect groups are identified based on the trained classifier.

公开(公告)号：US20200218241A1

公开(公告)日：2020-07-09

申请号：US16242844

申请日：2019-01-08

Applicant: KLA-Tencor Corporation

Inventor： Erfan Soltanmohammadi ,  Ashwin Ramakrishnan ,  Mohit Jani

IPC: G05B19/418

Abstract: An inspection system may receive inspection datasets from a defect inspection system associated with inspection of one or more samples, where an inspection dataset of the plurality of inspection datasets associated with a defect includes values of two or more signal attributes and values of one or more context attributes. An inspection system may further label each of the inspection datasets with a class label based on respective positions of each of the inspection datasets in a signal space defined by the two or more signal attributes, where each class label corresponds to a region of the signal space. An inspection system may further segment the inspection datasets into two or more defect groups by training a classifier with the values of the context attributes and corresponding class labels for the inspection datasets, where the two or more defect groups are identified based on the trained classifier.