公开(公告)号：US20160025646A1

公开(公告)日：2016-01-28

申请号：US14875084

申请日：2015-10-05

Applicant: KLA-TENCOR CORPORATION

Inventor： Amnon MANASSEN ,  Andrew HILL ,  Avi ABRAMOV

IPC: G01N21/88 ,  G01N21/47

CPC classification number: G01N21/8806 ,  G01J1/0228 ,  G01J3/02 ,  G01J3/021 ,  G01J3/0218 ,  G01J3/0229 ,  G01J3/2823 ,  G01N21/47 ,  G01N21/8851 ,  G01N21/9501 ,  G01N21/956 ,  G01N21/95623 ,  G01N2021/8848 ,  G01N2201/06 ,  G03F7/70633

Abstract: Methods and systems are provided, which pattern an illumination of a metrology target with respect to spectral ranges and/or polarizations, illuminate a metrology target by the patterned illumination, and measure radiation scattered from the target by directing, at a pupil plane, selected pupil plane pixels from a to respective single detector(s) by applying a collection pattern to the pupil plane pixels. Single detector measurements (compressive sensing) has increased light sensitivity which is utilized to pattern the illumination and further enhance the information content of detected scattered radiation with respect to predefined metrology parameters.

Abstract translation: 提供了方法和系统，其对于光谱范围和/或偏振来对计量目标进行照明，通过图案化照明照亮度量目标，并且通过在瞳孔平面指导所选择的瞳孔来测量从目标散射的辐射 通过将收集图案应用于瞳孔平面像素，从一个或多个单个检测器的平面像素。 单个检测器测量（压缩感测）具有增加的光敏度，其用于对照明进行图案化，并且相对于预定义的度量参数进一步增强检测到的散射辐射的信息内容。