公开(公告)号：US09964440B2

公开(公告)日：2018-05-08

申请号：US14860598

申请日：2015-09-21

Applicant: KLA Tencor Corporation

Inventor： Earl M. Jensen ,  Mei H. Sun ,  Kevin O'Brien

IPC: H01L27/142 ,  G01J3/02 ,  G01J1/58 ,  G01J3/36 ,  G01J3/12

CPC classification number: G01J3/0259 ,  G01J1/58 ,  G01J3/0205 ,  G01J3/021 ,  G01J3/0256 ,  G01J3/0262 ,  G01J3/36 ,  G01J2003/1213

Abstract: A sensor apparatus has a substrate and a spectrally selective detection system, and a cover. The spectrally sensitive detection system is sandwiched between the substrate and the cover. The spectrally selective detection system includes a generally laminar array of wavelength selectors optically coupled to a corresponding array of optical detectors located within the substrate. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.