公开(公告)号：US11690162B2

公开(公告)日：2023-06-27

申请号：US17223942

申请日：2021-04-06

Applicant: KLA Corporation

Inventor： Ilya Bezel ,  Andrey Evgenievich Stepanov ,  Leonid Borisovich Zvedenuk ,  Yuriy Gennadievich Kutsenko ,  Boris Vasilyevich Potapkin ,  Sumeet Kumar

IPC: H05H1/46

CPC classification number: H05H1/46

Abstract: A laser-sustained plasma (LSP) light source with vortex gas flow is disclosed. The LSP source includes a gas containment structure for containing a gas, one or more gas inlets configured to flow gas into the gas containment structure, and one or more gas outlets configured to flow gas out of the gas containment structure. The one or more gas inlets and the one or more gas outlets are arranged to generate a vortex gas flow within the gas containment structure. The LSP source also includes a laser pump source configured to generate an optical pump to sustain a plasma in a region of the gas containment structure within an inner gas flow within the vortex gas flow. The LSP source includes a light collector element configured to collect at least a portion of broadband light emitted from the plasma.

公开(公告)号：US20210321508A1

公开(公告)日：2021-10-14

申请号：US17223942

申请日：2021-04-06

Applicant: KLA Corporation

Inventor： Ilya Bezel ,  Andrey Evgenievich Stepanov ,  Leonid Borisovich Zvedenuk ,  Yuriy Gennadievich Kutsenko ,  Boris Vasilyevich Potapkin ,  Sumeet Kumar

IPC: H05H1/46

Abstract: A laser-sustained plasma (LSP) light source with vortex gas flow is disclosed. The LSP source includes a gas containment structure for containing a gas, one or more gas inlets configured to flow gas into the gas containment structure, and one or more gas outlets configured to flow gas out of the gas containment structure. The one or more gas inlets and the one or more gas outlets are arranged to generate a vortex gas flow within the gas containment structure. The LSP source also includes a laser pump source configured to generate an optical pump to sustain a plasma in a region of the gas containment structure within an inner gas flow within the vortex gas flow. The LSP source includes a light collector element configured to collect at least a portion of broadband light emitted from the plasma.

公开(公告)号：US11637008B1

公开(公告)日：2023-04-25

申请号：US17890813

申请日：2022-08-18

Applicant: KLA Corporation

Inventor： Sumeet Kumar ,  Joshua Wittenberg ,  Mark S. Wang ,  Rajkeshar Singh ,  Yoshio Kagebayashi ,  Shinichiro Nozaki

IPC: H01H1/24 ,  H01J65/04 ,  H01J61/02 ,  G01N21/21

Abstract: A plasma lamp for use in a broadband plasma source of an inspection tool is disclosed. The plasma lamp includes a plasma bulb configured to contain a gas and generate a plasma within the plasma bulb. The plasma bulb is formed from a material at least partially transparent to illumination from a pump laser and at least a portion of broadband radiation emitted by the plasma. The plasma bulb includes a conical pocket. The conical pocket is configured to disrupt a plume rising from the plasma.