公开(公告)号：US20210223274A1

公开(公告)日：2021-07-22

申请号：US16747734

申请日：2020-01-21

Applicant: KLA Corporation

Inventor： Renan Milo ,  Roie Volkovich ,  Anna Golotsvan ,  Tal Yaziv ,  Nir BenDavid

IPC: G01N35/00 ,  G06N20/00

Abstract: A system for analyzing one or more samples includes a sample analysis sub-system configured to perform one or more measurements on the one or more samples. The system further includes a controller configured to: receive design of experiment (DoE) data for performing the one or more measurements on the one or more samples; determine rankings for a set of target parameters; generate a recipe for performing the one or more measurements on the one or more samples based on the DoE data and the rankings of the set of target parameters; determine run parameters based on the recipe; perform the one or more measurements on the one or more samples, via the sample analysis sub-system, according to the recipe; and adjust the run parameters based on output data associated with performing the one or more measurements on the one or more samples.

公开(公告)号：US11761969B2

公开(公告)日：2023-09-19

申请号：US16747734

申请日：2020-01-21

Applicant: KLA Corporation

Inventor： Renan Milo ,  Roie Volkovich ,  Anna Golotsvan ,  Tal Yaziv ,  Nir BenDavid

IPC: G01N35/00 ,  G06N20/00

CPC classification number: G01N35/00623 ,  G01N35/00693 ,  G06N20/00

Abstract: A system for analyzing one or more samples includes a sample analysis sub-system configured to perform one or more measurements on the one or more samples. The system further includes a controller configured to: receive design of experiment (DoE) data for performing the one or more measurements on the one or more samples; determine rankings for a set of target parameters; generate a recipe for performing the one or more measurements on the one or more samples based on the DoE data and the rankings of the set of target parameters; determine run parameters based on the recipe; perform the one or more measurements on the one or more samples, via the sample analysis sub-system, according to the recipe; and adjust the run parameters based on output data associated with performing the one or more measurements on the one or more samples.