公开(公告)号：US20240378483A1

公开(公告)日：2024-11-14

申请号：US18195115

申请日：2023-05-09

Applicant: KLA Corporation

Inventor： Stilian Pandev ,  Proteek Roy

IPC: G06N20/00

Abstract: A method for improving measurement performance of characterization systems is disclosed. The method may include training a plurality of machine learning models based on a set of training data, where each machine learning model is capable of generating an uncertainty estimator and a first machine learning model is different from one or more additional machine learning models based on one of a set of hyperparameters or a dataset. The method may further include receiving a plurality of sample measurement datasets from one or more test samples. For each of the plurality of sample measurement datasets, the method may further include applying each trained machine learning model to determine a measurement value and the uncertainty estimator for each trained machine learning model and generating a measurement output based on N trained machine learning models with the lowest uncertainty estimators.