公开(公告)号：US11454894B2

公开(公告)日：2022-09-27

申请号：US17161604

申请日：2021-01-28

Applicant: KLA Corporation

Inventor： Alon Yagil ,  Yuval Lamhot ,  Ohad Bachar ,  Martin Mayo ,  Tal Yaziv ,  Roie Volkovich

IPC: G03F7/20 ,  G01B11/06 ,  H01L21/66

Abstract: A method and system for measuring misregistration between different layers of a semiconductor device, the method including providing a set of pupil inaccuracy scalable basis elements (PISBEs) relating to a plurality of patterned semiconductor device wafers (PSDWs), generating a single pupil image of a site on a PSDW, the PSDW being one of the plurality of PSDWs, by taking a single measurement of the site, the single pupil image including a plurality of site-specific pixels, calculating a set of site-specific pupil inaccuracy scalable basis element scaling factors (PISBESFs) for the single pupil image using the set of PISBEs and the plurality of site-specific pixels and calculating a site-specific misregistration value (SSMV) using the set of PISBEs and the set of site-specific PISBESFs.

公开(公告)号：US20220082950A1

公开(公告)日：2022-03-17

申请号：US17161604

申请日：2021-01-28

Applicant: KLA Corporation

Inventor： Alon Yagil ,  Yuval Lamhot ,  Ohad Bachar ,  Martin Mayo ,  Tal Yaziv ,  Roie Volkovich

IPC: G03F7/20 ,  H01L21/66 ,  G01B11/06

Abstract: A method and system for measuring misregistration between different layers of a semiconductor device, the method including providing a set of pupil inaccuracy scalable basis elements (PISBEs) relating to a plurality of patterned semiconductor device wafers (PSDWs), generating a single pupil image of a site on a PSDW, the PSDW being one of the plurality of PSDWs, by taking a single measurement of the site, the single pupil image including a plurality of site-specific pixels, calculating a set of site-specific pupil inaccuracy scalable basis element scaling factors (PISBESFs) for the single pupil image using the set of PISBEs and the plurality of site-specific pixels and calculating a site-specific misregistration value (SSMV) using the set of PISBEs and the set of site-specific PISBESFs.