公开(公告)号：US11293970B2

公开(公告)日：2022-04-05

申请号：US17101856

申请日：2020-11-23

Applicant: KLA Corporation

Inventor： David W. Price ,  Robert J. Rathert ,  Kara L. Sherman ,  John Charles Robinson ,  Mike Von Den Hoff ,  Barry Saville ,  Robert Cappel ,  Oreste Donzella ,  Naema Bhatti ,  Thomas Groos ,  Teng-Song Lim ,  Doug Sutherland

IPC: G01R31/28

Abstract: An inspection system may include a controller communicatively coupled to one or more in-line sample analysis tools including, but not limited to, an inspection tool or a metrology tool. The controller may identify defects in a population of dies based on data received from at least one of the one or more in-line sample analysis tools, assign weights to the identified defects indicative of predicted impact of the identified defects on reliability of the dies using a weighted defectivity model, generate defectivity scores for the dies in the population by aggregating the weighted defects in the respective dies in the population, and determine a set of outlier dies based on the defectivity scores for the dies in the population, wherein at least some of the set of outlier dies are isolated from the population.

公开(公告)号：US20210215753A1

公开(公告)日：2021-07-15

申请号：US17101856

申请日：2020-11-23

Applicant: KLA Corporation

Inventor： David W. Price ,  Robert J. Rathert ,  Kara L. Sherman ,  John Charles Robinson ,  Mike Von Den Hoff ,  Barry Saville ,  Robert Cappel ,  Oreste Donzella ,  Naema Bhatti ,  Thomas Groos ,  Teng-Song Lim ,  Doug Sutherland

IPC: G01R31/28

Abstract: An inspection system may include a controller communicatively coupled to one or more in-line sample analysis tools including, but not limited to, an inspection tool or a metrology tool. The controller may identify defects in a population of dies based on data received from at least one of the one or more in-line sample analysis tools, assign weights to the identified defects indicative of predicted impact of the identified defects on reliability of the dies using a weighted defectivity model, generate defectivity scores for the dies in the population by aggregating the weighted defects in the respective dies in the population, and determine a set of outlier dies based on the defectivity scores for the dies in the population, wherein at least some of the set of outlier dies are isolated from the population.