公开(公告)号：US20240060914A1

公开(公告)日：2024-02-22

申请号：US17888776

申请日：2022-08-16

Applicant: KLA Corporation

Inventor： Mohsen Mahvash ,  John J. Hench ,  Samad Jafarzanjani ,  Rebecca Shen ,  Christopher D. Liman ,  Boxue Chen

IPC: G01N23/20066

CPC classification number: G01N23/20066 ,  G01N2223/304 ,  G01N2223/305 ,  G01N2223/6116

Abstract: Methods and systems for estimating values of parameters of interest from X-ray scatterometry measurements with reduced computational effort are described herein. Values of parameters of interest are estimated by regression using a trained, machine learning (ML) based electromagnetic (EM) response model. A training data set includes sets of Design Of Experiments (DOE) values of parameters of interest and corresponding DOE values of a plurality of electromagnetic response metrics. In some examples, values of parameters of interest are determined from measured images based on regression using a sequence of trained ML based electromagnetic response models. In some examples, input values employed to train the ML based EM response model are scaled based on model output variation.