公开(公告)号：US20250016905A1

公开(公告)日：2025-01-09

申请号：US18759284

申请日：2024-06-28

Applicant: KLA Corporation

Inventor： Oleg Khodykin ,  Boris Korneev ,  Ilya Bezel ,  Andrey Zakirov ,  Andrey Evgenievich Stepanov ,  Vitaliy Rerikh ,  Leonid Borisovich Zvedenuk

IPC: H05H1/24 ,  H01J37/32 ,  H05H1/00 ,  H05H1/46

Abstract: A LSP broadband light source is disclosed. The light source may include a gas containment structure. The light source may include multiple jet nozzles, wherein the jet nozzles are configured to generate supersonic gas jets and direct the supersonic gas jets to collide within the gas containment structure to form a localized high-pressure region at the collision point. The light source may include a primary laser pump source, wherein the primary laser pump source is configured to direct a primary pump beam to a localized high-pressure region formed at the collision point. The light source may include a pulsed-assisting laser source, wherein the pulsed-assisting laser source is configured to direct a pulsed-assisting beam to the localized high-pressure region at the collision point. The light source may include a light collector element configured to collect broadband light emitted from the plasma.