公开(公告)号：US11883857B2

公开(公告)日：2024-01-30

申请号：US17505185

申请日：2021-10-19

Applicant: KCTECH CO., LTD.

Inventor： Hyung Chul Kim ,  You Sun Jung

IPC: B08B3/02 ,  B08B5/04

CPC classification number: B08B3/02 ,  B08B5/04 ,  B08B2203/0282

Abstract: A cleaning solution detection device includes a transfer part configured to unload and transfer a substrate having a surface to which a cleaning solution is applied when a cleaning process is completed, a detector configured to detect the cleaning solution that falls from the surface of the substrate in a process in which the substrate is unloaded and transferred by the transfer part, and a controller configured to determine whether a dangerous situation occurs due to a fall of the cleaning solution based on information detected by the detector.

公开(公告)号：US11701693B2

公开(公告)日：2023-07-18

申请号：US17781700

申请日：2020-11-05

Applicant: KCTECH CO., LTD.

Inventor： Hyung Chul Kim ,  Dong Hwa Lee ,  You Sun Jung

IPC: H01L21/67 ,  B08B13/00 ,  B08B7/00

CPC classification number: B08B13/00 ,  B08B7/0021

Abstract: The substrate processing device according to one embodiment may comprise: a chamber unit provided with a processing space therein and comprising an inclined chamber surface having an opening; a door unit comprising an inclined door surface, which corresponds to the inclined chamber surface, and capable of being coupled to the chamber unit; and a door driving unit for driving the door unit so as to open/close the processing space.