公开(公告)号：US11673108B2

公开(公告)日：2023-06-13

申请号：US16637241

申请日：2017-08-07

Applicant: KASUGA DENKI, INC.

Inventor： Satoru Ogiso ,  Takao Morishita ,  Yukihira Sakurai ,  Junya Yoshida ,  Satoshi Sugimura

IPC: H05H1/24 ,  B01J19/08 ,  H05H1/34 ,  H05H1/30 ,  H01J37/32 ,  B29C59/14

CPC classification number: B01J19/088 ,  H01J37/32073 ,  H05H1/30 ,  H05H1/34 ,  H05H1/3478 ,  B01D2259/818 ,  B01J2219/0875 ,  B29C59/14 ,  H01J37/3244

Abstract: A discharge electrode E in an electrode chamber C comprises a plurality of electrode members 8, 9. The electrode members 8, 9 are disposed facing each other by having a supporting member 4 therebetween, a gap is formed between the facing portions of the electrode members 8, 9, and by having the gap as a gas passageway 15, the gas passageway is opened in the leading end of the discharge electrode. A replacement gas having been supplied from a manifold pipe 3 is supplied to the gas passageway 15 via an orifice.

公开(公告)号：US11318439B2

公开(公告)日：2022-05-03

申请号：US16637247

申请日：2018-08-07

Applicant: KASUGA DENKI, INC.

Inventor： Satoshi Sugimura ,  Satoru Ogiso ,  Yukihira Sakurai ,  Junya Yoshida ,  Takao Morishita

IPC: B01J19/08 ,  H05H1/24

Abstract: Surface modification device forms a discharge area E1 between a discharge electrode 6 and a counter electrode 4, supplies substitution gas to the discharge area E1, and modifies the surface of the base material to be processed. The surface modification device comprises; a slit-shaped substitution gas passage; and cover members 7, 8 that form curtain passages 22, 23 in spaces facing the discharge electrode. While the substitution gas is being supplied to the discharge area E1, gas injected from the curtain passages 22, 23 prevent the inflow of an entrained flow a and the outflows b1, b2 of the substitution gas, thereby maintaining the concentration of substitution gas inside the discharge area E1.