公开(公告)号：US09305743B2

公开(公告)日：2016-04-05

申请号：US14482520

申请日：2014-09-10

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Takehiro Nakai ,  Hideki Shuto

IPC: B25H7/04 ,  B25H7/00 ,  H01J37/22

CPC classification number: H01J37/226 ,  B25H7/04 ,  H01J37/28 ,  H01J2237/208 ,  H01J2237/2448 ,  H01J2237/2817

Abstract: In accordance with an embodiment, a marking apparatus includes a charged particle beam device and a marking unit. The charged particle beam device generates a charged particle beam, irradiates a sample including a laminated body with the charged particle beam, detects secondary charged particles generated from the sample, and acquires a sample image. The marking unit bores a hole reaching at least a second layer from a surface layer in the laminated body in a viewing field of the charged particle beam device.

Abstract translation: 根据实施例，标记装置包括带电粒子束装置和标记单元。 带电粒子束装置产生带电粒子束，照射带有带电粒子束的层叠体的样本，检测从样本产生的二次带电粒子，并取得样本图像。 标记单元在带电粒子束装置的视野中从层叠体中的表面层到达至少第二层的孔。

公开(公告)号：US09645086B2

公开(公告)日：2017-05-09

申请号：US14199732

申请日：2014-03-06

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Takehiro Nakai

IPC: G01J3/44 ,  G01N21/65

CPC classification number: G01N21/65

Abstract: In accordance with an embodiment, a componential analysis method includes dividing a sample structure into at least a first layer to be analyzed and a second layer located closer to a surface layer of the sample than the first layer, applying, to the sample, laser lights of first and second wavelengths respectively corresponding to the depths of the first and second layers, detecting Raman scattered lights respectively obtained from the sample by the application of the laser lights and then outputting first and second Raman signals, spectrally processing the first and second Raman signals to acquire first and second Raman spectrums, acquiring a differential spectrum by subtracting the second Raman spectrum from the first Raman spectrum, and analyzing the differential spectrum.