公开(公告)号：US20100055352A1

公开(公告)日：2010-03-04

申请号：US12099556

申请日：2008-04-08

Applicant: James L. MAXWELL

Inventor： James L. MAXWELL

IPC: C23C16/48

CPC classification number: C23C16/4418 ,  B81C99/0095 ,  B81C2201/0188 ,  C23C16/4415 ,  C23C16/455 ,  C23C16/4551 ,  C23C16/483

Abstract: A method of growing a plurality of free-standing structures comprises providing a plurality of free-standing structures, each free-standing structure having a first end coupled to a substrate, and a terminal end; providing at least one laser beam, the laser beam having a beam waste at a point proximate to the terminal end of the free-standing structure; and moving one of the plurality of freestanding structures or the beam waste to provide a growth zone proximate to the terminal end of each of the free-standing structures such that the free-standing structures grow into the growth zones by addition of decomposing precursor components. The growth rates of each of the free-standing structures are substantially the same.

Abstract translation: 生长多个独立结构的方法包括提供多个独立结构，每个独立结构具有耦合到衬底的第一端和终端; 提供至少一个激光束，所述激光束在靠近所述独立结构的终端的点处具有光束废料; 并且移动所述多个独立结构或束废料中的一个以提供靠近每个独立结构的末端的生长区，使得通过添加分解的前体组分而使自立结构生长到生长区中。 每个独立结构的增长率基本相同。

公开(公告)号：US20090110848A1

公开(公告)日：2009-04-30

申请号：US11923788

申请日：2007-10-25

Applicant: James L. MAXWELL ,  Robert W. SPRINGER

Inventor： James L. MAXWELL ,  Robert W. SPRINGER

IPC: C23C16/48 ,  C23C16/44

CPC classification number: C23C14/3435

Abstract: A method for carrying out pulsed laser deposition is disclosed. The method comprises providing a target having a desired composition; irradiating the target with a pulsed laser beam to provide a plume of target material; and directing the plume in a desired direction by use of an inert carrier gas. The plume of target material is passed through an aperture to create an atomic beam. One or both of the plume or the atomic beam is irradiated to reduce the amount of agglomerated particles in the atomic beam. The atomic beam is directed onto a substrate to produce a deposition product. An apparatus for carrying out the method is also disclosed.

Abstract translation: 公开了一种进行脉冲激光沉积的方法。 该方法包括提供具有所需组成的靶; 用脉冲激光束照射靶，以提供羽状目标材料; 并且通过使用惰性载气将所述羽流引导到期望的方向。 目标材料的羽流通过孔径以产生原子束。 照射羽流或原子束中的一个或两个以减少原子束中的附聚颗粒的量。 原子束被引导到基底上以产生沉积产物。 还公开了一种用于执行该方法的装置。