公开(公告)号：US08426025B2

公开(公告)日：2013-04-23

申请号：US12635296

申请日：2009-12-10

申请人： Matthias Keil ,  Jakob Nilsson ,  Johan Ring ,  Babak Heidari

发明人： Matthias Keil ,  Jakob Nilsson ,  Johan Ring ,  Babak Heidari

IPC分类号： B32B27/08

CPC分类号： B29C33/3857 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  Y10T428/31504 ,  Y10T428/3154

摘要： The invention provides a modification of a polymer film surface interaction properties. In this process a polymer carrier object is covered by a chemical composition, comprising photo-polymerizable compounds, photo-initiators or catalysts with the ability to initiate polymerization and semi-fluorinated molecules. The so-produced polymer mold contains semi-fluorinated moieties, which are predominantly located on the surface and on the surface near region of the patterned surface. The polymer mold is suitable as a template with modified properties in a nano-imprint lithography process.

摘要翻译： 本发明提供了聚合物膜表面相互作用特性的改进。 在该方法中，聚合物载体物体被包含可光聚合化合物，具有引发聚合能力和半氟化分子的光引发剂或催化剂的化学组合物覆盖。 如此生产的聚合物模具包含半氟化部分，其主要位于图案表面附近的表面和表面附近。 聚合物模具适合作为纳米压印光刻工艺中具有改性特性的模板。

公开(公告)号：US09063408B2

公开(公告)日：2015-06-23

申请号：US12635329

申请日：2009-12-10

申请人： Jakob Nilsson ,  Matthias Keil ,  Johan Ring ,  Babak Heidari

发明人： Jakob Nilsson ,  Matthias Keil ,  Johan Ring ,  Babak Heidari

IPC分类号： G03F7/00 ,  G03F7/038 ,  C08F2/50 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/004

CPC分类号： G03F7/0002 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0048 ,  G03F7/038

摘要： The invention to provide curable materials, comprising photo-reactive compounds, in particular, photoinitiators and polymerizable mono- or multifunctional monomers such as acrylates or epoxides. The material may also contain fluoro-surfactants completely or partly terminated by functional groups with the ability to bind covalently to said chemical composition under curing. The curable compositions are either purely acrylate based or a hybrid of different types of monomers such as acrylates, epoxides or vinyl ethers. The polymerizable monomers may cure with the use of different types of photoinitiator, such as free radical photoinitiators or cationic photoinitiators, ultimately forming a hybrid resist comprising interpenetrating networks of different types of monomers e.g. acrylates and epoxides. The acrylate/epoxide hybrid system has showed improved replication properties in terms of high nano-imprint lithography process fidelity, due to increased conversion of acrylates and low shrinkage.

摘要翻译： 本发明提供可固化材料，其包含光反应性化合物，特别是光引发剂和可聚合的单或多官能单体如丙烯酸酯或环氧化物。 该材料还可以含有完全或部分由官能团封端的氟表面活性剂，其具有在固化下与所述化学组合物共价键合的能力。 可固化组合物是纯丙烯酸酯基或不同类型的单体如丙烯酸酯，环氧化物或乙烯基醚的杂化物。 可聚合单体可以使用不同类型的光引发剂（例如自由基光引发剂或阳离子光引发剂）固化，最终形成包含不同类型单体的互穿网络的混合抗蚀剂。 丙烯酸酯和环氧化物。 由于丙烯酸酯的转化率增加和收缩率低，丙烯酸酯/环氧化物混合体系在高纳米压印光刻工艺保真度方面具有改进的复制性能。