公开(公告)号：US20040183014A1

公开(公告)日：2004-09-23

申请号：US10801874

申请日：2004-03-16

Applicant: JEOL Ltd.

Inventor： Toru Kagawa

IPC: H01J037/28

CPC classification number: H01J37/20 ,  H01J37/28 ,  H01J2237/153 ,  H01J2237/2814

Abstract: A scanning electron microscope has an electron gun for producing an electron beam, a specimen holder holding the specimen, an objective lens for sharply focusing the beam onto the specimen, and a power supply for applying a negative voltage to the specimen. A shielding plate made of a conductive material and having at least one hole for limiting the region of the specimen surface illuminated by the beam is mounted on the holder. A voltage almost equal to the voltage applied to the specimen is applied to the shielding plate.

Abstract translation: 扫描电子显微镜具有用于产生电子束的电子枪，保持样本的样本架，用于将光束聚焦到样本上的物镜和用于向样本施加负电压的电源。 由导电材料制成并具有至少一个用于限制由梁照射的试样表面的区域的孔的屏蔽板安装在支架上。 将几乎等于施加到试样的电压的电压施加到屏蔽板。