公开(公告)号：US20230015109A1

公开(公告)日：2023-01-19

申请号：US17865850

申请日：2022-07-15

Applicant: JEOL Ltd.

Inventor： Tatsuhito Kimura ,  Munehiro Kozuka ,  Naoki Sugano

IPC: G01B21/06 ,  G02B21/18 ,  G02B21/26

Abstract: A specimen machining device includes an illumination system that illuminates a specimen; a camera that photographs the specimen; and a processing unit that controls the illumination system and the camera, and acquires a machining control image which is used for controlling an ion source and a display image which is displayed on a display unit. The processing unit controls the illumination system to illuminate the specimen under a machining illumination condition; acquires the machining control image by controlling the camera to photograph the specimen illuminated under the machining control illumination condition; controls the ion source based on the machining control image; controls the illumination system to illuminate the specimen under a display illumination condition which is different from the machining control illumination condition; acquires the display image by controlling the camera to photograph the specimen illuminated under the display illumination condition; and displays the display image on the display unit.