公开(公告)号：US20210247233A1

公开(公告)日：2021-08-12

申请号：US17142635

申请日：2021-01-06

Applicant: JASCO CORPORATION

Inventor： Kento AIZAWA ,  Yoshiko KUBO ,  Erika TAIRA ,  Yuji HIGUCHI

IPC: G01J3/45 ,  G02B21/00 ,  G01N21/359

Abstract: A method of analyzing foreign matter in a sample includes: measuring an optical spectrum for each of a plurality of measurement points of a measurement region on the sample by a microscopic spectroscope; calculating a feature value of each measured spectrum by a computer; determining whether each of the measurement points is on the foreign matter or not based on each feature value; retaining the spectrum of the measurement point that is determined to be on the foreign matter, and deleting the spectrum of the measurement point that is not determined to be on the foreign matter or storing the same to a storage unit; and executing multivariate analysis of the spectra of the plurality of the measurement points that are determined to be on the foreign matter or classifying the same with AI search.