公开(公告)号：US11821833B2

公开(公告)日：2023-11-21

申请号：US17803102

申请日：2022-02-05

Applicant: J.A. WOOLLAM CO., INC.

Inventor： Stefan Schoeche ,  Craig M. Herzinger ,  Steven E. Green ,  Martin M. Liphardt ,  James D. Welch

IPC: G01N21/21

CPC classification number: G01N21/211 ,  G01N2201/021 ,  G01N2201/06113 ,  G01N2201/12

Abstract: An ellipsometer, polarimeter and the like system operating in the infrared spectral range (0.75 μm to 1000 μm), utilizing a tunable quantum cascade laser (QCL) source with the capability if reducing speckle and standing wave effects, dual-rotatable optical elements, a single-point detector, as well as optional means of reducing the size of the probe beam at the measurement surface and optional chopper for lock-in detection.

公开(公告)号：US20230194414A1

公开(公告)日：2023-06-22

申请号：US17803102

申请日：2022-02-05

Applicant: J.A WOOLLAM CO., INC.

Inventor： Stefan Schoeche ,  Craig M. Herzinger ,  Steven E. Green ,  Martin M. Liphardt ,  James D. Welch

IPC: G01N21/21

CPC classification number: G01N21/211 ,  G01N2201/12 ,  G01N2201/021 ,  G01N2201/06113

Abstract: An ellipsometer, polarimeter and the like system operating in the infrared spectral range (0.75 um to 1000 µm), utilizing a tunable quantum cascade laser (QCL) source with the capability if reducing speckle and standing wave effects, dual-rotatable optical elements, a single-point detector, as well as optional means of reducing the size of the probe beam at the measurement surface and optional chopper for lock-in detection.

公开(公告)号：US11740176B2

公开(公告)日：2023-08-29

申请号：US17803029

申请日：2022-01-18

Applicant: J.A. WOOLLAM CO., INC.

Inventor： Stefan Schoeche ,  Craig M. Herzinger ,  Steven E. Green ,  Martin M. Liphardt ,  James D. Welch

IPC: G01N21/21

CPC classification number: G01N21/211 ,  G01N2021/213 ,  G01N2201/021 ,  G01N2201/06113 ,  G01N2201/12

Abstract: An ellipsometer, polarimeter and the like system operating in the infrared spectral range (0.75 μm to 1000 μm), utilizing a tunable quantum cascade laser (QCL) source in combination with dithering capability to reduce speckle and standing wave effects, dual-rotating optical elements, a single-point detector, as well as optional means of reducing the size of the probe beam at the measurement surface and optional chopper for lock-in detection.