公开(公告)号：US20180169606A1

公开(公告)日：2018-06-21

申请号：US15832736

申请日：2017-12-05

Applicant: Industrial Technology Research Institute

Inventor： Chun-An Lu ,  Yuan-Ling Tsai ,  Chiung-Hsiung Chen ,  Yi-Chen Wu ,  Shih-Chin Lin

IPC: B01J19/08 ,  B01J19/12

CPC classification number: B01J19/088 ,  B01J19/129 ,  B01J2219/0809 ,  B01J2219/083 ,  B01J2219/0833 ,  B01J2219/0869 ,  B01J2219/0875 ,  B01J2219/0898

Abstract: An apparatus for producing an inorganic powder and an apparatus for producing and classifying an inorganic powder are provided, wherein the apparatus for producing an inorganic powder includes an insulating tube, at least one pair of annular RF electrodes, and a gas supply apparatus. The pair of annular RF electrodes surrounds the outer circumference of the insulating tube to generate a first electric field region outside the insulating tube and generate a second electric field region having a plasma torch in the insulating tube after being turned on. The gas supply apparatus supplies a reaction mist and an inert gas into the insulating tube to thermally degrade and oxidize the reaction mist into an inorganic powder via the plasma torch.