公开(公告)号：US20200214092A1

公开(公告)日：2020-07-02

申请号：US16232237

申请日：2018-12-26

Applicant: Industrial Technology Research Institute

Inventor： Chia-Ching Huang ,  Yueh-Lin Tsai ,  Jui-Hung Chen

IPC: H05B6/68 ,  H05B6/72

Abstract: A method of distributively controlling phases is provided, including: inputting, by a plurality of phase-controlled power modules, microwave via each input ports into a chamber, to allow the microwave in the chamber to form a first electric field distribution; and adjusting, by each of the phase-controlled power modules, phases of microwave signals fed into the chamber at each input port, to allow the microwave in the chamber to generate a second electric field distribution complementary to the first electric field distribution due to a phase change.