公开(公告)号：US20240153788A1

公开(公告)日：2024-05-09

申请号：US18360771

申请日：2023-07-27

Applicant: Industrial Technology Research Institute

Inventor： Jia-Cheng Sun ,  Jui-Hsiang Cheng ,  I-Ling Nien ,  Chia-Yen Kuo ,  Shou-Nan Li

IPC: H01L21/67

CPC classification number: H01L21/67017 ,  H01L21/67253

Abstract: An addition system of a reducing agent in a semiconductor manufacturing process includes pre-treatment and post-treatment gas concentration detection devices, a process exhaust gas treatment device, a reducing agent supply device, and an addition system control device. The process exhaust gas treatment device purifies exhaust gas of a semiconductor manufacturing process and emits a post-treatment gas. The reducing agent supply device supplies a reducing agent gas into the process exhaust gas treatment device. The post-treatment gas concentration detection device detects a residual concentration of the reducing agent gas in the post-treatment gas. The addition system control device calculates destruction and removal efficiency (DRE) for process gases according to pre-treatment and post-treatment gas concentrations, and, according to the DRE and the residual concentration, sends a signal to the reducing agent supply device to control the amount of the reducing agent gas added.

公开(公告)号：US11633695B1

公开(公告)日：2023-04-25

申请号：US17564228

申请日：2021-12-29

Applicant: Industrial Technology Research Institute

Inventor： Chuan-Lin Chang ,  Hong-Ping Lin ,  Shou-Nan Li ,  Jui-Hsiang Cheng ,  Hui-Ya Shih ,  I-Ling Nien

IPC: B01D46/00 ,  B01D46/24 ,  B01D53/46 ,  B01D53/75 ,  B01D53/76 ,  B01D53/86 ,  B01J23/745 ,  B01J35/02

Abstract: A device and method of simultaneously removing flammable gases and nitrous oxide are provided. The device includes a thermal oxidation chamber, a high-temperature resistant dust filter, and a catalyst chamber. The thermal oxidation chamber is configured to receive an exhaust gas from a process tool. The exhaust gas includes flammable gases and nitrous oxide. The thermal oxidation chamber has a first exhaust pipe to emit nitrous oxide and dust generated after the exhaust gas is thermally oxidized. The high-temperature resistant dust filter receives dust and nitrous oxide from the first exhaust pipe, wherein the high-temperature resistant dust filter has a filter fiber net and a second exhaust pipe, and the second exhaust pipe is configured to emit nitrous oxide. The catalyst chamber receives nitrous oxide from the second exhaust pipe, wherein the catalyst chamber has a nitrous oxide decomposition catalyst to decompose nitrous oxide into nitrogen and oxygen.