Patterning process for oxide film
    2.
    发明授权
    Patterning process for oxide film 有权
    氧化膜图案化工艺

    公开(公告)号:US08906247B2

    公开(公告)日:2014-12-09

    申请号:US13942162

    申请日:2013-07-15

    CPC classification number: B44C1/227 C23C24/082 C23C24/085 H01L21/0272

    Abstract: The present disclosure provides a patterning process for an oxide film, including: covering a barrier layer composition on a substrate to form a patterned barrier layer, wherein the barrier layer composition includes an inorganic component and an organic binder with a weight ratio of 50-98:2-50; forming an oxide film on the patterned barrier layer and the substrate, wherein a thickness ratio (D1/D2) of the barrier layer (D1) to the oxide film (D2) is about 5-2000; and lifting off the barrier layer and the oxide film thereon, while leaving portions of the oxide film on the substrate.

    Abstract translation: 本公开提供了一种用于氧化物膜的图案化工艺,包括:在基板上覆盖阻挡层组合物以形成图案化阻挡层,其中阻挡层组合物包含无机组分和重量比为50-98的有机粘合剂 :2-50; 在图案化的阻挡层和基板上形成氧化膜,其中阻挡层(D1)与氧化膜(D2)的厚度比(D1 / D2)约为5〜2000; 并且在其上放置阻挡层和氧化膜,同时将氧化膜的一部分留在基板上。

    SUPERABSORBENT POLYMERS
    3.
    发明申请
    SUPERABSORBENT POLYMERS 有权
    超级聚合物

    公开(公告)号:US20130171737A1

    公开(公告)日:2013-07-04

    申请号:US13720087

    申请日:2012-12-19

    Abstract: A superabsorbent polymer network formed of two monomers and two crosslinkers. The monomers and the crosslinkers are described herein. Further, a method for preparing this superabsorbent polymer network is disclosed. Also disclosed is a method of determining a ratio between two monomeric moieties in a superabsorbent polymer network formed of two monomers.

    Abstract translation: 由两种单体和两种交联剂形成的超吸收聚合物网络。 本文描述了单体和交联剂。 此外,公开了制备该超吸收性聚合物网络的方法。 还公开了确定由两种单体形成的超吸收聚合物网络中的两个单体部分之间的比率的方法。

Patent Agency Ranking