公开(公告)号：US11454537B2

公开(公告)日：2022-09-27

申请号：US16575416

申请日：2019-09-19

Applicant: Industrial Technology Research Institute

Inventor： Wen-Hsien Su ,  Chun-Ming Wen ,  Chia-Ching Lin

IPC: G01J1/02 ,  H05K7/20

Abstract: An optical measurement stability control system includes a case, a circulating flow field, an optical measurement system and a heat dissipation flow field. The case has an airtight space. The circulating flow field is located in the airtight space and adapted to generate an airflow flowing in the airtight space. The optical measurement system is located in the airtight space and located on a flow path of the airflow. The heat dissipation flow field is connected to the case and located at an end of the flow path. The heat dissipation flow field discharges heat out of the airtight space by heat conduction and forced convection.