公开(公告)号：US11137590B2

公开(公告)日：2021-10-05

申请号：US15067195

申请日：2016-03-11

Applicant: Industrial Technology Research Institute

Inventor： Chia-Jung Chang ,  Jing-Yuan Lin ,  Chun-Kai Mao ,  Jien-Ming Chen ,  Yu-Sheng Hsieh

IPC: G02B26/00

Abstract: A tunable optical device including a substrate, at least one support unit, a flexible frame, an elastic component, a first reflector, and at least one actuator is provided. The support unit is fixed onto the substrate. The flexible frame is connected to the support unit and suspended above the substrate. The elastic component is connected to the flexible frame. A stiffness of the elastic component in the Z-axis is smaller than a stiffness of the flexible frame in the Z-axis. The Z-axis direction is parallel to a normal direction of the substrate. The first reflector is connected to the elastic component. The actuator is located between the flexible frame and the substrate or located between the first reflector and the substrate.

公开(公告)号：US20170139200A1

公开(公告)日：2017-05-18

申请号：US15067195

申请日：2016-03-11

Applicant: Industrial Technology Research Institute

Inventor： Chia-Jung Chang ,  Jing-Yuan Lin ,  Chun-Kai Mao ,  Jien-Ming Chen ,  Yu-Sheng Hsieh

IPC: G02B26/00

CPC classification number: G02B26/001

Abstract: A tunable optical device including a substrate, at least one support unit, a flexible frame, an elastic component, a first reflector, and at least one actuator is provided. The support unit is fixed onto the substrate. The flexible frame is connected to the support unit and suspended above the substrate. The elastic component is connected to the flexible frame. A stiffness of the elastic component in the Z-axis is smaller than a stiffness of the flexible frame in the Z-axis. The Z-axis direction is parallel to a normal direction of the substrate. The first reflector is connected to the elastic component. The actuator is located between the flexible frame and the substrate or located between the first reflector and the substrate.