公开(公告)号：US20240310234A1

公开(公告)日：2024-09-19

申请号：US18578121

申请日：2022-06-01

申请人： INFICON GmbH

发明人： Silvio Decker ,  Simon Mathioudakis ,  Randolf Paul Rolff

IPC分类号： G01M3/26 ,  G01M3/20

CPC分类号： G01M3/26 ,  G01M3/20

摘要： A leak detection device for combined integral and localizing leak detection, comprising a test specimen port (14), a test specimen high vacuum pump (16), the inlet of which is connected with the test specimen port (14), at least one pre-vacuum pump (20), the inlet of which is connected via a test specimen line (18) with the outlet (19) of the test specimen high vacuum pump (16), and a gas detector (32) connected with the pre-vacuum pump (20), which is connected via at least a first gas line (28) with the test specimen high vacuum pump (16), the test specimen line (18) and/or the specimen port (14) such that gas from the test specimen port (14) is supplied to the gas detector (32) via the gas line (28) for gas analysis, characterized in that a gas pressure measuring volume (22) connected with a gas pressure sensor is configured in the test specimen line (18) such that, during the gas measurement with the gas detector (32), an integral leak detection can be carried out by measuring the pressure profile in the gas pressure measuring volume (22).