公开(公告)号：US20220365339A1

公开(公告)日：2022-11-17

申请号：US17317059

申请日：2021-05-11

申请人： II-VI Delaware, Inc

发明人： Jiang-Huai ZHOU ,  Glenn D BARTOLINI

IPC分类号： G02B26/08 ,  G01J3/26 ,  G02B26/00 ,  G02B7/188 ,  G02B26/02

摘要： An optoelectronic device, including a tunable optical filter or tunable optical filter with photodiode, uses voltage differentials to filter an optical signal passing along an optical path. A membrane has an electrode and is disposed adjacent a fixed mirror and another. A central portion of the membrane is distanced from the fixed mirror and has an aperture in which a second mirror is disposed. This second mirror translates with the membrane at a freespace gap relative to the fixed mirror when the electrodes are subject to the voltage differentials. In turn, the freespace gap is configured as a Fabry-Perot etalon to pass one or more spectral frequencies of the optical signal along the optical path. The membrane is shaped and reinforced to limit possible bowing. The translatable mirror in the aperture of the membrane is also shaped and reinforced to limit it from possible bowing as well.