公开(公告)号：US08310328B2

公开(公告)日：2012-11-13

申请号：US12899836

申请日：2010-10-07

Applicant: Hung Yi Lin ,  Ming Fa Chen

Inventor： Hung Yi Lin ,  Ming Fa Chen

IPC: H01F5/00 ,  H01F27/28 ,  H01L27/08

CPC classification number: H01F41/042 ,  H01F5/003 ,  H01L21/76 ,  Y10T29/49069 ,  Y10T29/49071 ,  Y10T29/49073 ,  Y10T29/49146

Abstract: A method of making a planar coil is disclosed in the present invention. First, a substrate having a trench is provided. Then, a barrier and a seed layer are formed on the substrate in sequence. An isolative layer is used for guiding a conductive material to flow into a lower portion of the trench such that accumulation of the conductive material at opening of the trench is prevented before the lower portion of the trench is completely filled up, thereby avoiding gap formation in the trench.

Abstract translation: 在本发明中公开了制造平面线圈的方法。 首先，提供具有沟槽的衬底。 然后，依次在基板上形成阻挡层和种子层。 隔离层用于引导导电材料流入沟槽的下部，使得沟槽开口处的导电材料的积聚在沟槽的下部被完全填充之前被阻止，从而避免了在沟槽中的间隙形成 沟渠。