公开(公告)号：US20190226997A1

公开(公告)日：2019-07-25

申请号：US15877638

申请日：2018-01-23

Applicant: Hong Kong Applied Science And Technology Research Institute Co. Ltd.

Inventor： Vladislav Nitikin ,  Wang Fei Ng ,  Ka Kit Wong ,  Xiaozhe Ren ,  Ying Liu

IPC: G01N21/88 ,  G01N21/958

Abstract: The invention provides an apparatus for inspecting a light transmissible optical component. The apparatus comprises an image capturing module arranged on a first side of a support configured to hold a light transmissible optical component whilst it is being inspected. The apparatus includes an illumination device configured to shape light from a light source and to illuminate a selected portion of a surface of said light transmissible optical component with said shaped light to enable the image capturing module to capture any of a bright field image, a dark field image, or a combined bright field and dark field image of the light transmissible optical component being held by the support.