公开(公告)号：US20160139609A1

公开(公告)日：2016-05-19

申请号：US15006380

申请日：2016-01-26

申请人： Hitachi Metals, Ltd.

发明人： Alexei V. Smirnov ,  Patrick Albright ,  Cy Jordan ,  Arun Nagarajan ,  Michael J. Zolock ,  Ryan Johnson ,  Alexander Fernandez

IPC分类号： G05D7/06 ,  F16K37/00

CPC分类号： G05D7/0635 ,  F16K37/0091 ,  Y10T137/0318 ,  Y10T137/7759

摘要： A mass flow controller and method for operating the same is disclosed. The mass flow controller includes a mass flow control system to control the mass flow rate of a fluid, and a data logging component that obtains snapshots of condition-specific-data for each of a plurality of reoccurring condition types, and reduces each snapshot of condition-specific-data to functional parameter values that characterize each snapshot of condition-specific-data, and the data logging component generates statistical values that are stored in a short term data store that characterize multiple functional parameter values that are obtained during each separate occurrence of a specific condition type. A diagnostics component diagnoses failures using current functional parameter values and the statistical values stored in the short-term memory, and a prognostics component predicts failures based upon a collection of data sets that are stored in the long-term memory.

摘要翻译： 公开了一种质量流量控制器及其操作方法。 质量流量控制器包括用于控制流体的质量流量的质量流量控制系统，以及数据记录部件，其获得针对多个重现条件类型中的每一个的条件特定数据的快照，并且减少条件的每个快照 特定数据到表征条件特定数据的每个快照的功能参数值，并且数据记录组件生成存储在短期数据存储中的统计值，其表征在每个单独发生期间获得的多个功能参数值 具体条件类型。 诊断组件使用当前功能参数值和存储在短期存储器中的统计值来诊断故障，并且预测组件基于存储在长期存储器中的数据集合的集合来预测故障。

公开(公告)号：US09766635B2

公开(公告)日：2017-09-19

申请号：US15006380

申请日：2016-01-26

申请人： Hitachi Metals, Ltd.

发明人： Alexei V. Smirnov ,  Patrick Albright ,  Cy Jordan ,  Arun Nagarajan ,  Michael J. Zolock ,  Ryan Johnson ,  Alexander Fernandez

IPC分类号： G06F11/30 ,  G05D7/06 ,  F16K37/00

CPC分类号： G05D7/0635 ,  F16K37/0091 ,  Y10T137/0318 ,  Y10T137/7759

摘要： A mass flow controller and method for operating the same is disclosed. The mass flow controller includes a mass flow control system to control the mass flow rate of a fluid, and a data logging component that obtains snapshots of condition-specific-data for each of a plurality of reoccurring condition types, and reduces each snapshot of condition-specific-data to functional parameter values that characterize each snapshot of condition-specific-data, and the data logging component generates statistical values that are stored in a short term data store that characterize multiple functional parameter values that are obtained during each separate occurrence of a specific condition type. A diagnostics component diagnoses failures using current functional parameter values and the statistical values stored in the short-term memory, and a prognostics component predicts failures based upon a collection of data sets that are stored in the long-term memory.