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公开(公告)号:US11210770B2
公开(公告)日:2021-12-28
申请号:US16355419
申请日:2019-03-15
Applicant: Hitachi, Ltd.
Inventor: Maria Teresa Gonzalez Diaz , Dipanjan Ghosh , Adriano Arantes , Michiko Yoshida , Jiro Hashizume , Chetan Gupta , Phawis Thammasorn
Abstract: Example implementations described herein involve defect analysis for images received from a camera system, which can involve applying a first model configured to determine regions of interest of the object from the images, applying a second model configured to identify localized areas of the object based on the regions of interest on the images; and applying a third model configured to identify defects in the localized ones of the images.
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公开(公告)号:US10082456B2
公开(公告)日:2018-09-25
申请号:US14962334
申请日:2015-12-08
Applicant: Hitachi, Ltd.
Inventor: Jiro Hashizume , Kei Takenaka , Takanori Aono
IPC: G01N21/17
CPC classification number: G01N21/171 , G01N2021/1712
Abstract: The present invention includes: an excitation light source; a probe light source; a filter that mutually multiplexes a probe light emitted from the probe light source and an excitation light emitted from the excitation light source to a same optical axis; a condenser lens that focuses the excitation light and the probe light; a sample cell that stores a sample; a reflection member that is disposed on an inner wall of the sample cell and reflects the probe light; and a detector that detects the probe light reflected at the reflection member.
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