公开(公告)号：US20110053301A1

公开(公告)日：2011-03-03

申请号：US12868099

申请日：2010-08-25

Applicant: Hee-Cheol KANG ,  Jong-Heon Kim ,  Ji-Sook Oh ,  Sang-Soo Kim

Inventor： Hee-Cheol KANG ,  Jong-Heon Kim ,  Ji-Sook Oh ,  Sang-Soo Kim

IPC: H01L51/30

CPC classification number: C23C14/50 ,  C23C14/12 ,  C23C14/24 ,  C23C14/56

Abstract: A thin film deposition apparatus that is suitable for production of large-sized substrates with fine patterns includes: an electrostatic chuck including a body that contacts a substrate that constitutes a deposition target and including a supporting surface supporting the substrate, an electrode installed in the body to generate an electrostatic force on the supporting surface, and a battery that is electrically connected to the electrode in the body; a plurality of chambers that are maintained in vacuum states; at least one thin film deposition assembly disposed in one of the plurality of chambers, separated by a predetermined distance from the substrate, and forming a thin film on the substrate supported by the electrostatic chuck; and a carrier moving the electrostatic chuck through the chambers.

Abstract translation: 适合于生产具有精细图案的大尺寸基板的薄膜沉积装置包括：静电卡盘，其包括与构成沉积靶的基板接触并包括支撑基板的支撑表面的主体，安装在主体中的电极 在所述支撑面上产生静电力，以及与所述电极电连接的电池; 维持在真空状态的多个室; 至少一个薄膜沉积组件，其设置在与所述基板隔开预定距离的多个室之一中，并且在由所述静电卡盘支撑的所述基板上形成薄膜; 以及将静电卡盘移动通过室的载体。

公开(公告)号：US20110042659A1

公开(公告)日：2011-02-24

申请号：US12836760

申请日：2010-07-15

Applicant: Jong-Heon KIM ,  Hyun-Sook PARK ,  Jae-Kwang RYU ,  Hee-Cheol KANG ,  Ji-Sook OH

Inventor： Jong-Heon KIM ,  Hyun-Sook PARK ,  Jae-Kwang RYU ,  Hee-Cheol KANG ,  Ji-Sook OH

IPC: H01L51/05 ,  C23C16/04 ,  B05D5/12 ,  H01L51/40

CPC classification number: C23C14/042 ,  C23C14/12 ,  C23C14/243 ,  H01L51/0011 ,  H01L51/56

Abstract: A thin film deposition apparatus that includes a thin film deposition assembly incorporating: a deposition source that discharges a deposition material; a deposition source nozzle unit that is disposed at a side of the deposition source and includes a plurality of deposition source nozzles arranged in a first direction; a patterning slit sheet that is disposed opposite to the deposition source nozzle unit and includes a plurality of patterning slits arranged in the first direction; and a barrier plate assembly including a plurality of barrier plates that are disposed between the deposition source nozzle unit and the patterning slit sheet in the first direction, and partition a space between the deposition source nozzle unit and the patterning slit sheet into a plurality of sub-deposition spaces, wherein each of the barrier plates is separate from the patterning slit sheet.

Abstract translation: 一种薄膜沉积设备，包括：薄膜沉积组件，其包括：沉积源，其沉积沉积材料; 沉积源喷嘴单元，其设置在沉积源的一侧并且包括沿第一方向布置的多个沉积源喷嘴; 图案化缝隙片，其与所述沉积源喷嘴单元相对设置并且包括沿所述第一方向布置的多个图案化狭缝; 以及阻挡板组件，其包括沿着所述第一方向设置在所述沉积源喷嘴单元和所述图案化缝隙片之间的多个阻挡板，并且将所述沉积源喷嘴单元和所述图案化缝隙片之间的空间分隔成多个子 - 沉积空间，其中每个阻挡板与图案化缝隙片分离。

公开(公告)号：US20110165327A1

公开(公告)日：2011-07-07

申请号：US12979656

申请日：2010-12-28

Applicant: Hyun-Sook PARK ,  Chang-Mog JO ,  Hee-Cheol KANG ,  Yun-Mi LEE ,  Un-Cheol SUNG ,  Yong-Sun CHOI ,  Jong-Heon KIM ,  Jae-Kwang RYU

Inventor： Hyun-Sook PARK ,  Chang-Mog JO ,  Hee-Cheol KANG ,  Yun-Mi LEE ,  Un-Cheol SUNG ,  Yong-Sun CHOI ,  Jong-Heon KIM ,  Jae-Kwang RYU

IPC: C23C16/44 ,  C23C16/04

CPC classification number: C23C14/24 ,  C23C14/042 ,  H01L51/001

Abstract: A thin film deposition apparatus that can be simply applied to produce large-sized display devices on a mass scale and that improves manufacturing yield. The thin film deposition apparatus includes a deposition source that discharges a deposition material; a deposition source nozzle unit disposed at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; and a patterning slit sheet disposed opposite to the deposition source nozzle unit and including a plurality of patterning slits arranged in a second direction that is perpendicular to the first direction. A deposition is performed while the substrate or the thin film deposition apparatus moves relative to each other in the first direction, and the deposition source, the deposition source nozzle unit, and the patterning slit sheet are formed integrally with each other.

Abstract translation: 一种薄膜沉积装置，其可以简单地应用于大规模生产大尺寸显示装置并且提高制造产量。 薄膜沉积装置包括：放电沉积材料的沉积源; 沉积源喷嘴单元，设置在沉积源的一侧，并且包括沿第一方向布置的多个沉积源喷嘴; 以及与沉积源喷嘴单元相对设置并包括沿垂直于第一方向的第二方向布置的多个图案化狭缝的图案化缝隙片。 当基板或薄膜沉积装置在第一方向上相对移动时进行沉积，并且沉积源，沉积源喷嘴单元和图案化缝隙片彼此一体地形成。

公开(公告)号：US20110045617A1

公开(公告)日：2011-02-24

申请号：US12862153

申请日：2010-08-24

Applicant: Hee-Cheol KANG ,  Hyun-Sook Park ,  Jae-Kwang Ryu ,  Yong-Sup Chol ,  Yun-Ml Lee ,  Sang-Soo Kim

Inventor： Hee-Cheol KANG ,  Hyun-Sook Park ,  Jae-Kwang Ryu ,  Yong-Sup Chol ,  Yun-Ml Lee ,  Sang-Soo Kim

IPC: H01L33/26 ,  C23C16/44

CPC classification number: C23C14/044 ,  C23C14/12 ,  C23C14/243 ,  C23C14/568 ,  H01L51/001 ,  H01L51/0081 ,  H01L51/56 ,  Y10S414/135 ,  Y10T279/23

Abstract: A thin film deposition apparatus and an organic light-emitting display device by using the same. The thin film deposition apparatus includes an electrostatic chuck, an a plurality of chambers; at least one thin film deposition assembly; a carrier; a first power source plug; and a second power source plug. The electrostatic chuck includes a body having a supporting surface that contacts a substrate to support the substrate, wherein the substrate is a deposition target; an electrode embedded into the body and applying an electrostatic force to the supporting surface; and a plurality of power source holes formed to expose the electrode and formed at different locations on the body. The plurality of chambers are maintained in a vacuum state. The at least one thin film deposition assembly is located in at least one of the plurality of chambers, is separated from the substrate by a predetermined distance, and is used to form a thin film on the substrate supported by the electrostatic chuck. The carrier is used to move the electrostatic chuck to pass through the plurality of chambers. The first power source plug is installed to be attachable to and detachable from one of the power source holes in order to supply power to the electrode. The first power source plug is installed at an upstream of a path in which the electrostatic chuck is moved by the carrier. The second power source plug is installed to be attachable to and detachable from another of the power source holes in order to supply power to the electrode. The second power source plug is installed in the path to be downstream to the first power source plug with respect to the path.

Abstract translation: 一种薄膜沉积装置和使用该薄膜沉积装置的有机发光显示装置。 薄膜沉积设备包括静电卡盘，多个腔室; 至少一个薄膜沉积组件; 承运人 第一个电源插头; 和第二电源插头。 静电卡盘包括具有与基板接触以支撑基板的支撑表面的主体，其中基板是沉积靶; 电极，其嵌入到所述主体中并向所述支撑表面施加静电力; 以及形成为暴露电极并形成在身体上的不同位置处的多个电源孔。 多个室保持在真空状态。 所述至少一个薄膜沉积组件位于所述多个室中的至少一个室中，与所述衬底分离预定距离，并且用于在由所述静电吸盘支撑的所述衬底上形成薄膜。 载体用于移动静电卡盘以通过多个室。 第一电源插头被安装成可以从电源孔之一附接和拆卸，以向电极供电。 第一电源插头安装在静电卡盘由载体移动的路径的上游。 第二电源插头被安装成可以与另一个电源孔相连接和拆卸，以向电极供电。 第二电源插头安装在相对于路径到第一电源插头的下游的路径中。