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公开(公告)号:US10895504B2
公开(公告)日:2021-01-19
申请号:US16039163
申请日:2018-07-18
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Takashi Yasuda , Yoichi Kawada , Kazuki Horita , Hironori Takahashi , Takayoshi Kuga , Atsushi Nakanishi , Kazutaka Tomari
IPC: G01J3/42 , G01J3/02 , G01N21/3586 , G01N21/552
Abstract: A measurement auxiliary member is placed on an arrangement surface of a prism. A measurement object is placed on an upper surface of the measurement auxiliary member. The measurement auxiliary member totally reflects the terahertz wave input from a lower surface by the upper surface and outputs the totally-reflected terahertz wave from the lower surface. A main pulse of a terahertz wave totally reflected by the upper surface of the measurement auxiliary member without multiply-reflected inside any optical element on an optical path of the terahertz wave, and a noise pulse of a terahertz wave multiply-reflected inside any optical element on the optical path and reflected on an interface between the prism and the measurement auxiliary member, are temporally separated from each other when detecting a correlation by a terahertz wave detection element.