公开(公告)号：US20240393384A1

公开(公告)日：2024-11-28

申请号：US18795589

申请日：2024-08-06

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Masataka IKESU ,  Shinusuke Suzuki

IPC: G01R31/265 ,  G01R31/28 ,  G01R31/311 ,  H01L21/66

Abstract: A control part of a semiconductor fault analysis device outputs an alignment command that moves a chuck to a position at which a target is detectable by a first optical detection part and then aligns an optical axis of a second optical system with an optical axis of a first optical system with the target as a reference, and outputs an analysis command that applies a stimulus signal to a semiconductor device and receives light from the semiconductor device emitted according to a stimulus signal with at least one of a first optical detection part and a second optical detection part in a state in which a positional relationship between the optical axis of the first optical system and the optical axis of the second optical system is maintained.