公开(公告)号：US20170216973A1

公开(公告)日：2017-08-03

申请号：US15314182

申请日：2015-03-30

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Takeshi SAKAMOTO ,  Yasunori IGASAKI ,  Mamiko MATSUNAGA

IPC: B23K26/53 ,  B23K26/067 ,  B23K26/066

Abstract: A laser processing device includes: a laser light source emitting laser light; a converging optical system converging the laser light at an object to be processed; a reflective spatial light modulator modulating the laser light such that the laser light is caused to branch into 0th order light and ±nth order light (n is a natural number) including at least first processing light and second processing light, and the first processing light is converged at a first converging point and the second processing light is converged at a second converging point; and a light blocking part blocking light to be converged at an outside with respect to the first processing light and the second processing light of the 0th order light and the ±nth order light to be converged at the object.

公开(公告)号：US20170113301A1

公开(公告)日：2017-04-27

申请号：US15314170

申请日：2015-03-30

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Takeshi SAKAMOTO ,  Yasunori IGASAKI ,  Mamiko MATSUNAGA

IPC: B23K26/067 ,  B23K26/53 ,  B23K26/06

CPC classification number: B23K26/0676 ,  B23K26/064 ,  B23K26/0643 ,  B23K26/53 ,  B23K2101/40 ,  B23K2103/56

Abstract: A laser processing device includes: a laser light source; a converging optical system; and a reflective spatial light modulator modulating the laser light such that the laser light is caused to branch into at least first processing light and second processing light, and the first processing light is converged at a first converging point and the second processing light is converged at a second converging point. In a case in which W1 is a radius of the first processing light at a front face of the object, W2 is a radius of the second processing light at the front face, and D is a distance between the first converging point and the second converging point when viewed from a direction orthogonal to the front face, the reflective spatial light modulator modulates the laser light such that D>W1+W2 is satisfied.