公开(公告)号：US11978997B2

公开(公告)日：2024-05-07

申请号：US17398084

申请日：2021-08-10

Applicant: Gigaphoton Inc.

Inventor： Hirotaka Miyamoto ,  Takuma Yamanaka ,  Miwa Igarashi

IPC: H01S3/13 ,  G03F7/00 ,  H01S3/038 ,  H01S3/08 ,  H01S3/137

CPC classification number: H01S3/1305 ,  G03F7/70025 ,  H01S3/038 ,  H01S3/08009 ,  H01S3/137

Abstract: A laser apparatus includes an output coupling mirror; a grating that constitutes an optical resonator together with the output coupling mirror; a laser chamber in an optical path of the optical resonator; at least one prism in an optical path between the laser chamber and the grating; a rotary stage including an actuator that rotates the prism to change an incident angle of a laser beam from the laser chamber on the grating; a wavelength measuring unit that measures a central wavelength of the laser beam from the laser chamber through the output coupling mirror; an angle sensor that detects a rotation angle of the prism; a first control unit that controls the actuator at a first operation frequency; and a second control unit that controls the actuator at a second operation frequency.

公开(公告)号：US11467502B2

公开(公告)日：2022-10-11

申请号：US17341570

申请日：2021-06-08

Applicant: Gigaphoton Inc.

Inventor： Takuma Yamanaka ,  Hirotaka Miyamoto

IPC: G03F7/20 ,  H01S3/063

Abstract: A wavelength control method of a laser apparatus includes sequentially obtaining target wavelength data of a pulse laser beam, sequentially saving the target wavelength data, sequentially measuring a wavelength of the pulse laser beam to obtain a measured wavelength, calculating a wavelength deviation using the measured wavelength and the target wavelength data at a time before a time when the measured wavelength is obtained, and feedback-controlling the wavelength of the pulse laser beam using the wavelength deviation.