公开(公告)号：US20240395584A1

公开(公告)日：2024-11-28

申请号：US18663429

申请日：2024-05-14

Applicant: GLOBALWAFERS JAPAN CO., LTD.

Inventor： Takuya KAKUDA ,  Manabu KATO ,  Tetsuro TAMURA ,  Haruo SUDO

IPC: H01L21/67 ,  G05B19/4099 ,  H01L21/324 ,  H01L21/66

Abstract: By accurately detecting cooling medium leakage in a heat treatment apparatus, reductions in yield and production efficiency are suppressed. A controller controls a lamp voltage or lamp current applied to a plurality of lamps based on the temperature of a semiconductor substrate detected by a temperature detector. When n is a positive integer of 2 or more, indicating the lot order of the semiconductor substrate to be treated, the controller calculates a difference effect size (n), based on the maximum lamp voltage or maximum lamp current applied to the plurality of lamps, according to equation below: Difference effect size(n)=(maximum lamp voltage or maximum lamp current(n)−maximum lamp voltage or maximum lamp current(n−1))/standard deviation of the maximum lamp voltage or maximum lamp current in a predetermined lot range, and determines that an abnormality has occurred when the difference effect size(n)exceeds a first threshold.

公开(公告)号：US20240393052A1

公开(公告)日：2024-11-28

申请号：US18672730

申请日：2024-05-23

Applicant: GLOBALWAFERS JAPAN CO., LTD.

Inventor： Haruo SUDO ,  Tatsuhiko AOKI ,  Manabu KATO

IPC: F27D21/00 ,  F27D11/00 ,  F27D19/00 ,  F27D21/04 ,  F27D25/00

Abstract: The timing for removing granular SiOx deposits on an inner wall of a lamp sleeve is easily obtained to prevent a decrease in production efficiency and suppress an increase in power consumption for heat treatment. A heat treatment apparatus includes a plurality of lamps that heats a semiconductor substrate, a lamp sleeve that reflects irradiation light of the plurality of lamps; a power supply that applies a lamp voltage to the plurality of lamps; a temperature detector that detects a temperature of the semiconductor substrate, a controller that controls the lamp voltage or lamp current applied to the plurality of lamps, and a warning unit that makes a warning on timing for cleaning the lamp sleeve through a display or a voice. The controller causes the warning unit to issue a warning when the lamp voltage or lamp current applied to the plurality of lamps exceeds a predetermined threshold.