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1.发明申请OPTICAL COLLECTOR COLLECTING EXTREME ULTRAVIOLET RADIATION, METHOD FOR OPERATING SUCH AN OPTICAL COLLECTOR, AND EUV SOURCE WITH SUCH A COLLECTOR 有权收集极光紫外线辐射的光学收集器，用于操作这种光学收集器的方法和具有这种收集器的EUV源公开(公告)号：US20130003167A1
公开(公告)日：2013-01-03
申请号：US13635851
申请日：2011-03-16
Applicant: Franz Dieterich , Reza Abhari , Andrea Giovannini , Vipluv Aga
Inventor： Franz Dieterich , Reza Abhari , Andrea Giovannini , Vipluv Aga
CPC classification number: G03F7/70891 , B82Y10/00 , G03F7/70175 , G21K1/06 , G21K2201/061 , G21K2201/065
Abstract: An optical collector (15) for collecting extreme ultraviolet radiation or EUV light generated at a central EUV production site comprises a reflective shell (25). To cope with thermal loading of the collector and avoid deformations, the reflective shell (25) is mounted on a support structure (24), such that a cooling channel (29) is established between the back side of the reflective shell (25) and the support structure (24), the thickness of the reflective shell (25) is substantially reduced, such that the convective heat transfer between the back side of the reflective shell (25) and a cooling medium (26) flowing through the cooling channel (29) dominates the process of removing heat from the reflective shell (25) with respect to heat conduction, and a cooling circuit (33) is connected to the cooling channel (29); to supply a cooling medium (26) to the cooling channel (29) with a controlled coolant pressure and/or mass flow.
Abstract translation: 用于收集在中央EUV生产地点产生的极紫外辐射或EUV光的光学收集器（15）包括反射壳（25）。 为了应对收集器的热负荷并避免变形，反射壳体（25）安装在支撑结构（24）上，使得在反射壳体（25）的背面和 支撑结构（24），反射壳体（25）的厚度被大大减小，使得反射壳体（25）的背面与流过冷却通道的冷却介质（26）之间的对流热传递 29）支配相对于热传导从反射壳体（25）去除热量的过程，并且冷却回路（33）连接到冷却通道（29）; 以受控的冷却剂压力和/或质量流量将冷却介质（26）供应到冷却通道（29）。
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2.发明授权Optical collector for collecting extreme ultraviolet radiation, method for operating such an optical collector, and EUV source with such a collector 有权用于收集极紫外辐射的光收发器，用于操作这种光收发器的方法，以及用这种收集器的EUV源公开(公告)号：US09513569B2
公开(公告)日：2016-12-06
申请号：US13635851
申请日：2011-03-16
Applicant: Franz Dieterich , Reza Abhari , Andrea Giovannini , Vipluv Aga
Inventor： Franz Dieterich , Reza Abhari , Andrea Giovannini , Vipluv Aga
CPC classification number: G03F7/70891 , B82Y10/00 , G03F7/70175 , G21K1/06 , G21K2201/061 , G21K2201/065
Abstract: An optical collector (15) for collecting extreme ultraviolet radiation or EUV light generated at a central EUV production site comprises a reflective shell (25). To cope with thermal loading of the collector and avoid deformations, the reflective shell (25) is mounted on a support structure (24), such that a cooling channel (29) is established between the back side of the reflective shell (25) and the support structure (24), the thickness of the reflective shell (25) is substantially reduced, such that the convective heat transfer between the back side of the reflective shell (25) and a cooling medium (26) flowing through the cooling channel (29) dominates the process of removing heat from the reflective shell (25) with respect to heat conduction, and a cooling circuit (33) is connected to the cooling channel (29); to supply a cooling medium (26) to the cooling channel (29) with a controlled coolant pressure and/or mass flow.
Abstract translation: 用于收集在中央EUV生产地点产生的极紫外辐射或EUV光的光学收集器（15）包括反射壳（25）。 为了应对收集器的热负荷并避免变形，反射壳体（25）安装在支撑结构（24）上，使得在反射壳体（25）的背面和 支撑结构（24），反射壳体（25）的厚度被大大减小，使得反射壳体（25）的背面与流过冷却通道的冷却介质（26）之间的对流热传递 29）支配相对于热传导从反射壳体（25）去除热量的过程，并且冷却回路（33）连接到冷却通道（29）; 以受控的冷却剂压力和/或质量流量将冷却介质（26）供应到冷却通道（29）。
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