GAS DETECTION DEVICE AND GAS DETECTION METHOD

    公开(公告)号:US20210270760A1

    公开(公告)日:2021-09-02

    申请号:US16973063

    申请日:2019-04-24

    Abstract: A gas detector uses a MEMS gas sensor having: a substrate provided with a cavity and an insulating film over the cavity; a metal oxide semiconductor and a heater both provided on the insulating film. A drive circuit operates the heater with a predetermined period for a predetermined pulse duration in order to heat the metal oxide semiconductor. The drive circuit halts operation of the heater or elongates the period when a humidity sensor detects that the atmosphere is humid.

    GAS DETECTOR COMPRISING PLURAL GAS SENSORS AND GAS DETECTION

    公开(公告)号:US20210041386A1

    公开(公告)日:2021-02-11

    申请号:US16931485

    申请日:2020-07-17

    Abstract: A gas detector comprises: plural gas sensors provided with a metal-oxide semiconductor whose resistance changes based upon contact with a gas; and a driving circuit for operating the gas sensors. The gas detector stores the ratio between initial resistance in air of the metal-oxide semiconductor and initial resistance of the metal-oxide semiconductor in an atmosphere including a predetermined concentration of fron gas, for the plural gas sensors. The gas detector learns resistance in air of the metal-oxide semiconductor in a gas sensor in use, and detects occurrence of fron gas when resistance of the metal-oxide semiconductor of the gas sensor in use becomes lower than a value corresponding to the learned resistance in air divided by the ratio. The gas detector counts the period that a first gas sensor is used. When the first gas sensor has been used for a predetermined period, both the first gas sensor and a second gas sensor are used for a learning period to continue detection of fron by the first gas sensor and to learn the resistance in air of the metal-oxide semiconductor of the second gas sensor. After completion of the learning period, fron leakage is detected by the second gas sensor.

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