-
公开(公告)号：US20130313783A1
公开(公告)日：2013-11-28
申请号：US13893002
申请日：2013-05-13
Applicant: FEI Company
Inventor： Stephanus Hubertus Leonardus van den Boom , Henricus Fransiscus Maria van den Boom , Roland Wilhelmus Pieter Jonkers , Rients Jan de Groot , Pieter Hendrik Trudo Johannes Uland
IPC: F16L23/18
CPC classification number: F16L23/18 , F16J15/062 , F16J15/14 , F16J15/40 , F16J15/406 , F16L23/22
Abstract: The invention relates to an improved O-ring seal for use as a high vacuum seal. A limitation of standard O-rig seals is the permeation of water through the O-ring. Especially for instruments in which parts are kept at a cryogenic temperature, such as a cryogenic electron microscope, the presence of water in the vacuum is a problem, as this results in ice growth on the cryogenic parts. As a solution often a double O-ring seal is used, or a metal seal. Both of these solutions have severe draw-backs.The invention proposes to place the O-ring in a channel in which dry gas, such as dry nitrogen, is blown. In this way no water can permeate through the O-ring, resulting in a reduced base pressure and highly reduced ice growth.
Abstract translation: 本发明涉及用作高真空密封件的改进的O形密封圈。 标准O型钻机密封的限制是水通过O型圈的渗透。 特别是对于将部件保持在低温温度的仪器，如低温电子显微镜，真空中存在水是一个问题，因为这会导致低温部分的冰生长。 作为解决方案，通常使用双O型密封圈或金属密封。 这两种解决方案都有严重的后援。 本发明提出将O形环放置在干燥气体例如干燥氮气的通道中。 以这种方式，没有水可以通过O形环渗透，导致降低的基础压力和高度降低的冰的生长。
-
公开(公告)号：US11972920B2
公开(公告)日：2024-04-30
申请号：US17533610
申请日：2021-11-23
Applicant: FEI Company
Inventor： Pleun Dona , Casper Smit , Rients Jan de Groot
CPC classification number: H01J37/165 , H01J37/18 , B33Y80/00
Abstract: Methods and apparatus are disclosed for providing an X-ray shield within an ultra-high vacuum enclosure. A shell is fabricated, leak-tested, filled with an X-ray shielding material, and sealed. An elongated twisted X-ray shield can be deployed within a pump-out channel of an electron microscope or similar equipment. The shield can incorporate lead within a stainless steel shell, with optional low-Z cladding outside the shell. Further variations are disclosed.
-
公开(公告)号：US20230162942A1
公开(公告)日：2023-05-25
申请号：US17533610
申请日：2021-11-23
Applicant: FEI Company
Inventor： Pleun Dona , Casper Smit , Rients Jan de Groot
CPC classification number: H01J37/165 , H01J37/18 , B33Y80/00
Abstract: Methods and apparatus are disclosed for providing an X-ray shield within an ultra-high vacuum enclosure. A shell is fabricated, leak-tested, filled with an X-ray shielding material, and sealed. An elongated twisted X-ray shield can be deployed within a pump-out channel of an electron microscope or similar equipment. The shield can incorporate lead within a stainless steel shell, with optional low-Z cladding outside the shell. Further variations are disclosed.
-
-
Search Results
3
records
(took 0.012 seconds)
