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公开(公告)号：US11438996B2
公开(公告)日：2022-09-06
申请号：US16967151
申请日：2019-02-08
Applicant: Excillum AB
Inventor： Tomi Tuohimaa , Per Takman , Daniel Larsson
Abstract: A method for protecting an X-ray source including: a liquid jet generator configured to form a liquid jet moving along a flow axis; an electron source configured to provide an electron beam interacting with the liquid jet to generate X-ray radiation; the method including: generating the liquid jet: monitoring a quality measure indicating a performance of the liquid jet; identifying, based on the quality measure, a malperformance of the liquid jet; and if said malperformance is identified, causing the X-ray source to enter a safe mode for protecting the X ray source. Further, to corresponding devices.
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