公开(公告)号：US09709820B2

公开(公告)日：2017-07-18

申请号：US14725996

申请日：2015-05-29

申请人： Essilor International (Compagnie Generale D'Optique) ,  Nikon Corporation

发明人： Toru Fujii ,  Alain Goulet

IPC分类号： G02C7/02 ,  G02B3/08

CPC分类号： G02C7/022 ,  G02B3/08 ,  G02C7/02 ,  G02C2202/20

摘要： A refractive Fresnel lens used for an optical system including an image plane, which includes a plurality of zone lens surfaces disposed concentrically and a plurality of side wall surfaces each formed between adjacent zone lens surfaces, is characterized in that the side wall surfaces are modulated so as to spatially spread in the image plane noise light due to reflection and/or refraction at the side wall surfaces.

公开(公告)号：US20150261008A1

公开(公告)日：2015-09-17

申请号：US14725996

申请日：2015-05-29

申请人： Essilor International (Compagnie Generale D'Optique) ,  Nikon Corporation

发明人： Toru Fujii ,  Alain Goulet

IPC分类号： G02C7/02 ,  G02B3/08

CPC分类号： G02C7/022 ,  G02B3/08 ,  G02C7/02 ,  G02C2202/20

摘要： A refractive Fresnel lens used for an optical system including an image plane, which includes a plurality of zone lens surfaces disposed concentrically and a plurality of side wall surfaces each formed between adjacent zone lens surfaces, is characterized in that the side wall surfaces are modulated so as to spatially spread in the image plane noise light due to reflection and/or refraction at the side wall surfaces.

摘要翻译： 用于包括图像平面的光学系统的折射菲涅尔透镜，其包括同心设置的多个区域透镜表面和各自形成在相邻区域透镜表面之间的多个侧壁表面，其特征在于，侧壁表面被调制为 由于在侧壁表面上由于反射和/或折射而在图像平面上空间扩散噪声光。

公开(公告)号：US10591824B2

公开(公告)日：2020-03-17

申请号：US15082763

申请日：2016-03-28

申请人： NIKON CORPORATION

发明人： Toru Fujii

IPC分类号： G03F7/20 ,  G02B26/08 ,  G02B5/30 ,  G02B27/09 ,  G02B27/28

摘要： According to one embodiment, an illumination optical apparatus comprises: a light splitting device which splits the beam into a plurality of beams with respective polarization states different from each other; a spatial light modulation device which is arranged on at least one of a first optical path in which a first beam out of the plurality of beams travels and a second optical path in which a second beam out of the plurality of beams travels, and which has a plurality of optical elements arranged two-dimensionally and driven individually; and a control device which controls the spatial modulation device to combine the first beam and the second beam at least in part.