公开(公告)号：US20240081683A1

公开(公告)日：2024-03-14

申请号：US18364081

申请日：2023-08-02

Applicant: Electronics and Telecommunications Research Institute

Inventor： Chaehyun LIM ,  Hye Jin KIM

IPC: A61B5/11

CPC classification number: A61B5/1102

Abstract: A ballistocardiogram sensor according to an embodiment of the inventive concept includes a lower substrate including a support part, a plurality of connection parts, and a vertical movement part, a lower electrode on the lower substrate, a piezoelectric sensing layer on the lower electrode, and an upper electrode on the piezoelectric sensing layer. The vertical movement part is spaced apart from the support part with the connection parts therebetween. The connection parts connect the vertical movement part and the support part. The piezoelectric sensing layer vertically overlaps the vertical movement part. The connection parts may have a serpentine shape.